Acoustic surface wave arrangement of diamond - litao3

摘要

The present invention directed to a SAW device comprising a diamond layer and an LiTaO₃ layer, which can be operated at the frequency of 3 GHz or higher, with superior durability and less energy loss. The SAW device for 1st mode surface acoustic wave of a wavelength λ (µm) according to the present invention comprises: a diamond layer, an interdigital transducer formed onto the diamond layer, and a polycrystalline C-axis-oriented LiTaO₃ layer formed over the interdigital transducer; wherein the SAW device satisfies a relationship of 0.4 ≦ kh₁ ≦ 1.2, where a parameter kh₁ is defined as kh₁ = 2π(t₁/λ) , and t₁ (µm) is the thickness of the LiTaO₃ layer.