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oberflu00e4chenemittierender laser with vertical resonator and each on a common substrate and laserelementen

机译:带垂直谐振器的上激光发射器激光器,每个激光器都位于同一基板和激光元件上

摘要

The present invention relates to a semiconductor laser device and a method for fabrication thereof, wherein the semiconductor laser device exhibits an improved mode selectivety. According to the present invention there is provided a semiconductor laser device comprising a first and a second reflecting region (3,5), said first reflecting region being comprising a Bragg mirror (3) with alternating parallel layers having different refractive index, respectively, said first and second reflecting regions being adjacent to a laser active semiconductor region (1) for emitting radiation of a predetermined wavelength and defining a longitudinal laser cavity, exciting means for exiting said laser active semiconductor region causing emission of radiation, wherein said first reflecting region (3) further comprises a contact layer (2) on top thereof, and one additional layer (4) on top of said contact layer (2) covering only a portion of said contact layer, wherein an arrangement of said alternating layers forming said Bragg mirror, an optical thickness of said layer, and a reflectivity and an absorption of said additional layer is selected so as to reduce reflectivity of said reflecting region in said portion of said contact layer covered by said additional layer, resulting in a smaller reflectivity compared to a portion of said contact layer, which is not covered by said additional layer. Moreover, a method is provided in order to fabricate the above mentioned semiconductor laser device, wherein a step of calculation is performed to predict an optimised optical thickness of the contact layer and an optimised composition and thickness of the metallization layer to obtain a desired difference in reflectivity. IMAGE
机译:半导体激光器件及其制造方法技术领域本发明涉及一种半导体激光器件及其制造方法,其中该半导体激光器件表现出提高的模式选择性。根据本发明,提供了一种包括第一和第二反射区域(3,5)的半导体激光器件,所述第一反射区域包括布拉格镜(3),该布拉格镜(3)分别具有交替的具有不同折射率的平行层。第一和第二反射区域与用于发射预定波长的辐射并限定纵向激光腔的激光有源半导体区域(1)相邻,激发装置用于离开所述激光有源半导体区域而引起辐射的发射,其中所述第一反射区域( 3)进一步包括在其顶部上的接触层(2),以及在仅覆盖所述接触层的一部分的所述接触层(2)的顶部上的一个附加层(4),其中形成所述布拉格镜的所述交替层的布置,选择所述层的光学厚度,以及选择所述附加层的反射率和吸收率,以减小反射率。所述接触层的被所述附加层覆盖的所述部分中的所述反射区域,与所述接触层的未被所述附加层覆盖的部分相比,导致较小的反射率。此外,提供了一种用于制造上述半导体激光器件的方法,其中执行计算步骤以预测接触层的最佳光学厚度以及金属化层的最佳组成和厚度,以获得期望的差值。反射率。 <图像>

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