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Field emission device with improved ballast resistor.

机译:具有改进的镇流电阻器的场发射装置。

摘要

A field emission device (100) includes a cathode (110) and a ballast resistor (112) connected to cathode (110). Ballast resistor (112) includes a thin metallic layer (113) and a protective layer (114) disposed on metallic layer (113). Metallic layer (113) is made from chromium and has a thickness of about 40 angstroms. Protective layer (114) is made from sputtered silicon and has a thickness of about 500 angstroms. A portion of metallic layer (113) makes physical contact with cathode (110) and is sandwiched between cathode (110) and protective layer (114). Protective layer (114) is positioned to shield metallic layer (113) from high transient voltages.
机译:场发射装置(100)包括阴极(110)和连接到阴极(110)的镇流电阻器(112)。镇流电阻器(112)包括薄金属层(113)和设置在金属层(113)上的保护层(114)。金属层(113)由铬制成并且具有约40埃的厚度。保护层(114)由溅射的硅制成,并且具有约500埃的厚度。金属层(113)的一部分与阴极(110)物理接触,并夹在阴极(110)和保护层(114)之间。保护层(114)被定位成屏蔽金属层(113)免受高瞬态电压的影响。

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