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A method for two-dimensional adaptive process control of critical size during spin coating
A method for two-dimensional adaptive process control of critical size during spin coating
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机译:旋涂过程中临界尺寸的二维自适应过程控制方法
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摘要
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
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