Polymer thermo-optic optical waveguide element

摘要

PROBLEM TO BE SOLVED: To obtain a device equipped with a thin film heater which has good compatibility with a polymer optical waveguide, which is not oxidized, which is free from cracks even if the film is thick, which does not have temp. dependence of the resistance, and which can be controlled in a film thickness region with good controlling property, and which gives high production yield by forming a palladium-gold alloy film for the thin film heater. ;SOLUTION: The polymer optical waveguide device consists of a substrate, a polymer waveguide having a core part and a clad part surrounding the core on the substrate, and thin film heaters 12, 13 disposed on the upper part of the polymer waveguide. By heating the thin film heaters 12, 13 of the polymer optical waveguide device, the refractive index in a part near the core is changed to control the light which is transmitted through the core. In this polymer optical waveguide device, a palladium-gold alloy (Pd-Au) film is used as the heaters to control the refractive index, and a protective film made of a resist material is used.;COPYRIGHT: (C)2000,JPO