首页>
外国专利>
Wireless device and method for calibrating a temperature sensor
Wireless device and method for calibrating a temperature sensor
展开▼
机译:无线设备和校准温度传感器的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A device and method for calibrating at least one temperature sensor is disclosed herein. A wafer (30) is provided having a first plurality of calibration elements or islands (36) of a material having a melting point in the range 150 DEG - 1150 DEG C. The effective reflectivity of the wafer is measured in operation using the temperature sensor or via a separate light source. A first step change in an output signal of the temperature sensor corresponding to a wafer temperature equal to the melting point of the first calibration islands is detected. Finally, the temperature sensor calibration parameters are calculated. Other devices, systems and methods are also disclosed. IMAGE
展开▼