Hydrostatic gas bearing, stage device using the hydrostatic gas bearing, and optical device using the same

摘要

The present invention relates to a hydrostatic gas bearing and a stage device and an optical device which are provided with a gas layer between two relatively movable members (a stationary part and a movable part) to maintain a predetermined spacing, and can suppress the size of the apparatus and pull out the pipe It is an object of the invention to provide a hydrostatic gas bearing and a stage apparatus and an optical device that can facilitate the operation. In a hydrostatic gas bearing, which is provided with a fixed part 4 and a movable part 3 movable movably along the fixed part 4, and a gas layer between the fixed part 4 and the movable part 3 is maintained at a predetermined interval between the fixed part 4 and the movable part 3, the movable part 3 is concerned with the gas layer between the fixing part A bearing pad 3A for feeding the body and an exhaust groove 3C for exhausting gas fed by the bearing pad 3a are provided, and the fixing portion 4 has an exhaust port 4A provided at a position opposed to the exhaust groove 3C.