HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT AND GAS RECOVERY METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE

摘要

A hydrostatic gas bearing for use in vacuum in which increase in the quantity of gas being discharged during movement of a moving body is reduced by subjecting the surface of the guide shaft of a fixed body and/or the moving body to processing for reducing adhesion of gas molecules, e.g. by coating the surface (s) with a material having a low adhesion probability of gas molecule.