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Interference observer using the chromatic aberration correction phase shift device and chromatic aberration correction phase shift device
Interference observer using the chromatic aberration correction phase shift device and chromatic aberration correction phase shift device
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机译:使用色差校正相移装置和色差校正相移装置的干涉观察器
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摘要
(57) [Abstract] The present invention relates achromatic phase shift device for introducing an optical phase shift which is independent of the wavelength (40) in operation during the first light beam (1), but the device is first refracting means It is provided with distributed one element (55 k) at least formed second refractive means and the (2 k) by (4 k), 1 refracting means said is (2 k), the first optical beam (40 includes the (8) first refractive means output surface which is the angle that the first refractive means input plane for receiving) and (6), a predetermined relative to each other (β), said second refractive (4 k) is provided with second refractive means input plane (10), the second refractive means output plane that is positioned parallel to the (6) 1 refracting means and said input surface (12) means. The apparatus may comprise a (55 k) additional pairs of (, 4 k 2 k) second refractive means and first, respectively. In addition, the present invention relates to interference observer, including the chromatic aberration correction phase shift at least one device.
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