MR / inductive composite thin-film magnetic head using the soft magnetic film and the soft magnetic film

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic film having the characteristics of high saturation density and high resistivity and improve the core function and the shield function of a lower layer when the film is used for the lower core layer, by forming the soft magnetic film with a composition of Co_x, T_y, M_z and C_y. ;SOLUTION: A soft magnetic film (lower core layer) 7 so formed of a composition of Co_x, T_y, M_z, C_y, where T is one or more elements selected from Fe, Ni, Mn and Pd; M is one or more elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W. The composition ratios x, y, z and v satisfy the follows: When 70≤x≤96 at % and the element T is Fe, 0≤y≤6; when the element T is Ni, 0≤y≤20; when the element T is Mn, 0≤y≤15, and when the element T is Pd, 0≤y≤10, 1≤z≤7, 3≤v≤15. The 20% or more of the element M of the soft magnetic film 7 is preferably chemically bonded with C.;COPYRIGHT: (C)1999,JPO