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METHOD FOR MAKING MICROOPTICAL ELEMENT AND MICROOPTICAL ELEMENT, AND OPTICAL PICKUP AND OPTICAL COMMUNICATION MODULE
METHOD FOR MAKING MICROOPTICAL ELEMENT AND MICROOPTICAL ELEMENT, AND OPTICAL PICKUP AND OPTICAL COMMUNICATION MODULE
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机译:制作微光学元件和微光学元件的方法以及光学拾取和光学通信模块
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摘要
PROBLEM TO BE SOLVED: To drastically reduce the cost of microoptical elements by extremely increasing the number of the microoptical elements obtainable from a substrate material of a prescribed size.;SOLUTION: In making the microoptical elements having optical reflection surfaces by cutting the elements out of the substrate material 200 having the prescribed thickness, grooves 200c are formed by anisotropic etching at the substrate material 200 and the microoptical elements 200 are cut out in such a manner that the prescribed surfaces of the grooves 200c formed by the anisotropic etching are formed as the reflection surfaces 200b of the microoptical elements 200 and that the longest side or the second longest side of the microoptical elements 202 exists in the depth direction of the anisotropic etching.;COPYRIGHT: (C)2004,JPO
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