And method of three-dimensional inspection equipment of electronic components

摘要

An apparatus for three dimensional inspection of an electronic part (1040) which has a camera (1008) and illuminator (1017) for imaging a first view (1046) of the electronic part (1040). An optical element (1002) is positioned to reflect a different view (1048) of the electronic part (1040) into the camera (1008), and the camera (1008) thus provides an image (1044) of the electronic part having differing views of the electronic part (1040). An image processor (13) applies calculations on the differing views to calculate a three dimensional position of at least one portion of the electronic part.