ATMOSPHERIC PRESSURE PLASMA TREATMENT DEVICE, FILM MANUFACTURED BY USING THE SAME, MANUFACTURING METHOD OF FILM AND FILM MANUFACTURED BY THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment device capable of preventing an electrode from pollution and stably manufacturing a film, and to provide the film having stable quality and a manufacturing method of the same.;SOLUTION: For the atmospheric pressure plasma treatment device, forming the film on a surface of a base material by locating the base material between electrodes facing each other under an atmospheric pressure of under the pressure nearly the same as the atmospheric pressure, and by generating a discharge plasma by impressing a high frequency voltage between the electrodes under the atmosphere including reaction gas and inert gas. An exchangeable covering material is arranged at least on a part of the surface of the electrode.;COPYRIGHT: (C)2003,JPO