PARTIAL ADJUSTMENT METHOD OF PIEZOELECTRIC VIBRATING DEVICE AND PIEZOELECTRIC VIBRATING DEVICE PARTIALLY ADJUSTED THEREBY

摘要

PROBLEM TO BE SOLVED: To be able to make adjustment partially to the desired part only in the partial adjustment of a piezoelectric vibrating device and reject occurrence of failure parts and repetition of the partial adjustment.;SOLUTION: For a crystal vibrating-reed, each input and output electrodes 2 and 3, and an adjustment electrode 8 between these electrodes 2 and 3 are formed on a main surface of a crystal substrate 1. Outside edges of the each electrodes 2, 3, and 8 are covered with chromium protection layer 5, and etching process of ion beam radiation to the electrodes 2, 3, and 8 is made, respectively. Even if the ion beam is radiated to the adjacent electrodes by the failure of masks of the partial mask, etc., the electrode is protected by the protection layer 5. Therefore, the ion beam is not directly radiated.;COPYRIGHT: (C)2003,JPO