ELECTROLYTIC COMPOSITE POLISHING DEVICE, ELECTROLYTIC COMPOSITE POLISHING TOOL, AND ELECTROLYTIC COMPOSITE POLISHING METHOD

摘要

PROBLEM TO BE SOLVED: To efficiently and precisely polish an inner circumferential surface of even a pressure container having a large capacity and a small opening part.;SOLUTION: Granular polishing material Gs and electrolyte EL are put into a conductive hollow body 1 having a circular inner circumferential surface. An inner electrode 8 is immersed in the electrolyte EL, and an outer electrode 7 is set in contact with an outer surface of the hollow body 1. A current is fed from the outer electrode 7 to the inner electrode setting the hollow body 1 as an anode while the hollow body 1 is rotated. The electrolyte EL is fed from a feed system 3 into the hollow body 1 in order, while it is discharged by a discharge system 4 to be circulated. The inner circumferential surface of the hollow body 1 is thus polished by rubbing action and electrolytic action of the granular polishing material Gs flowing inside the hollow body 1.;COPYRIGHT: (C)2003,JPO