POLISHING SHEET HAVING RECESSED PART IN POLISHING LAYER

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive and resource saving polishing sheet superior in polishing performance applying finish polishing to a surface or an end face of a precision component such as a magnetic head, magnetic and optical discs, a semiconductor wafer, flattening of a semiconductor integrated circuit, an optical lens or an optical fiber by a polishing layer of a minimum area.;SOLUTION: In the polishing sheet, a polishing layer with an optional pattern necessary in polishing work is formed in one face of a substrate film. It is characterized by that partial recessed parts are formed on the polishing layer, the recessed parts are concentric, a polka-dot pattern, radial, volute, hexagonal or diagonal, a bank layer or a water repellent layer is provided on an outer circumferential part and/or an inner circumferential part not formed with the polishing layer, and pressure sensitive adhesive layers are provided in bottom faces of the polishing layer recessed parts.;COPYRIGHT: (C)2003,JPO