HIGH PURITY CALCIUM FLUORIDE SINTERED COMPACT AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a high strength, inexpensive, high purity calcium fluoride sintered compact which has improved sintering properties without reducing its purity or rather improving the purity by utilizing the cut scraps of high purity calcium fluoride single crystals for an optical member, or the like, as the raw material, and is suitable as a plasma resistant member used in a semiconductor production process, particularly, a large-sized product or a member having a complicated shape, and to provide a production method therefor.;SOLUTION: The high purity calcium fluoride sintered compact having a purity of ≥99.0% and a density of ≥3.17 g/cm³ is obtained by using a production method wherein powder obtained by pulverizing calcium fluoride single crystal pieces as the raw material is sintered by a hot press.;COPYRIGHT: (C)2004,JPO