Composite thin film magnetic head for a common unit used in the production methods of making and composite thin film magnetic head, of the composite thin film magnetic head

摘要

PROBLEM TO BE SOLVED: To provide the combined thin film magnetic head in which magnetic flux saturation and leak are reduced even though the magnetic pole portion is micronized, a throat height, an apex angle and an MR height are accurately set to desired values and to provide the manufacturing method through which the head is efficiently and quickly produced. ;SOLUTION: A recessed part is formed on a substrate 23 using a first magnetic film 24, which is the bottom section shield of an MR film 32, as a mask. Then, a second magnetic film 27 and a thin film coil 30 are formed in the recessed part and made flat to form the common unit for the production of the combined thin film magnetic head. Then, a third magnetic film 34 is formed while connecting to the film 27 to constitute of a bottom pole and made flat to form a right gap film 36 and a fourth magnetic film 37, which constitute of a top pole. Then, the films 34 and 36 are dry etched using the magnetic pole part as a mask to form the magnetic portion. It is also possible to provide an insulation film and an additional thin film coil on top of the coil 30 of the common unit.;COPYRIGHT: (C)1999,JPO