首页> 外国专利> MASK, SUBSTRATE WITH LIGHT REFLECTION FILM, METHOD FOR FORMING LIGHT REFLECTION FILM, METHOD FOR MANUFACTURING ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPARATUS

MASK, SUBSTRATE WITH LIGHT REFLECTION FILM, METHOD FOR FORMING LIGHT REFLECTION FILM, METHOD FOR MANUFACTURING ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPARATUS

机译:掩模,带有光反射膜的基质,形成光反射膜的方法,制造电光装置的方法,电光装置和电子设备

摘要

PROBLEM TO BE SOLVED: To provide a mask for manufacturing a substrate with a light reflection film which lessens the occurrence of interference fringes, with which the substrate with the light reflection film is manufactured, a method for manufacturing the light reflection film, an electro-optic device provided with the substrate with the light reflection film which lessens the occurrence of the interference fringes, and an electronic apparatus provided with the substrate with the light reflection film which lessens the occurrence of the interference fringes.;SOLUTION: The substrate with the light reflection film which is made substantially equal in the heights of a plurality of the projecting parts and the depths of the recessed parts formed on a base material, is formed with the plane shapes of a plurality of the projecting parts or the recessed parts to circles overlapping one ach other and polygonal shapes overlapping on each other or plane shapes of either one thereof and is randomly arrayed with a plurality of the projecting parts or the recessed parts in a plane direction is formed by using the mask which is formed with light transparent parts or light opaque parts with the dot components for the number smaller than the number of dot regions as one unit to be arrayed irregularly in the unit and includes a plurality of such units.;COPYRIGHT: (C)2004,JPO
机译:解决的问题:为了提供一种用于制造具有光反射膜的基板的掩模,该掩模能够减少干涉条纹的发生,从而制造具有光反射膜的基板,该光反射膜的制造方法,光学装置,其具有具有减少反射条纹的发生的光反射膜的基板,以及一种电子设备,其具有由基板和具有减少反射条纹的发生的光反射膜的基板构成的电子设备。在多个凸部的高度与形成在基材上的凹部的深度大致相等的反射膜上,形成有多个凸部或凹部的平面形状,以使其相互重叠。彼此重叠的多边形或其中之一的平面形状通过使用由光透明部分或光不透明部分形成的掩膜形成在平面方向上多个突出部分或凹入部分的掩模,其中光透明部分或光不透明部分的点分量的数量小于点区域的数量。单元不规则地排列在该单元中,并包括多个这样的单元。版权所有:(C)2004,JPO

著录项

  • 公开/公告号JP2003302740A

    专利类型

  • 公开/公告日2003-10-24

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20020108527

  • 申请日2002-04-10

  • 分类号G03F1/08;G02B5/08;G02B5/20;G02F1/1335;

  • 国家 JP

  • 入库时间 2022-08-22 00:19:07

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