Uses the electronic spectroscope and the spectroscope which have the angular resolution retarding independent operational die incident glass lens system the analysis manner

摘要

PROBLEM TO BE SOLVED: To provide an electron spectroscope equipped with angle resolving and retarding independently operating type incident lens system for achieving electronic spectral measurement with high energy resolution, high angular resolution and high sensitivity. SOLUTION: The angle resolving and retarding independently operating type electron spectroscope allows electrons emitted from the surface of a sample to be injected into a front-stage electrostatic lens via an introducing port. A diffraction plane of the electrostatic lens is provided with an angle-limiting aperture through which electrons converged by the electrostatic lens are injected via an aperture passage port into a second electrostatic lens for controlling the kinetic energy. The rear-stage lens converges the electrons into a rear-stage aperture and the electrons passing through the aperture are introduced into an electron analyzer, for analyzing the energy to be analyzed.