METAL-LESS BOND GRINDING WHEEL, METHOD AND DEVICE FOR ELECTROLYTIC DRESSING GRINDING USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a metal-less bond grinding wheel, method and device for electrolytic dressing grinding with using the same capable of preventing environmental pollution due to waste liquid containing heavy metal ions or metal contamination of device wafers while providing mirror surface high qual ity work surface with good working efficiency.;SOLUTION: This invention relates to the metal-less bond grinding wheel for electrolytic dressing to dress working surface by electrolytic dressing. The metal-less bond grinding wheel comprises abrasive grains and bond part retaining the abrasive grains. The bond part is composed of nonmetal material containing carbon. Current flowing between the grinding wheel and an electrode is controlled within a designated range with using the metal-less bond grinding wheel.;COPYRIGHT: (C)2003,JPO