ABRASION LOSS MEASUREMENT METHOD AND MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a means capable of exactly obtaining small abrasion of nano-meter size in a protection film on a sliding member surface.;SOLUTION: In the measurement method for abrasion loss of a measurement sample surface having a substrate and a coating layer, a standard sample surface spectrum is formed by using a surface element analyzer analyzing element of a material surface from charged particle energy spectrum obtained by measuring charged particles generated out of the material surface when excited ionization radiation is irradiated to a sample identical to the measurement sample. With this spectrum, a process for obtaining a signal intensity ratio of a plurality of elements is performed for a plurality of times, etching the standard sample surface in parallel, and a calibration curve indicating the distribution of the signal intensity ratio of a plurality of elements in the standard sample. Then the charged particle energy spectrum on the measurement sample surface is measured, the signal intensity ratio is calculated and referred to the calibration curve and the abrasion loss of the measurement sample is determined.;COPYRIGHT: (C)2004,JPO