ENVIRONMENTAL CONTROL SYSTEM FOR CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To suppress degradation of an air cleaning means for purifying air when performing environmental control of an interface which is a space for transferring an object to a processor installed in a clean room.;SOLUTION: A chamber 30 whose circumference is closed by the interface 18 for transferring a wafer which is the object to be processed from a wafer pod 14 to a manufacture device 12 installed in the clean room 10 is formed. An environmental control unit 32 provided with a temperature control module, a moisture content removal module, a chemical removal filter, and a particle removal filter is installed in the chamber 30 to circulate air in the chamber 30 through the environmental control unit 32.;COPYRIGHT: (C)2003,JPO