HIGH CLEAN ENVIRONMENTAL DEVICE, HIGH CLEAN ENVIRONMENTAL SYSTEM, METHOD OF APPLICATION OF HIGH CLEAN ENVIRONMENTAL DEVICE AND METHOD FOR ASSEMBLING, STARTING-UP OR MAINTENANCE OF DEVICE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a high clean environmental device and a high clean environmental system capable of realizing a local clean state in a unit of one or a plurality of unit processing devices and capable of preventing internal contamination of the unit processing device in the case that a maintenance work for each of the unit processing devices of a device manufacturing apparatus constituted by a plurality of unit processing devices and the plurality of unit processing devices are connected and the like.;SOLUTION: A high clean environmental device 10 has a rectangular parallelepiped enclosure 11. The enclosure 11 comprises a foldable frame 12 and a sheet-like enclosure 11a. Within the enclosure 11 is formed a closed space 13 having the same size as the inside size of the enclosure 11. The enclosure 11 can be shrunk to a volume of less than 1/10 of a volume of the closed space 13 when the frame 12 is folded. When a fan filter unit 20 is driven within the closed space 13, a 100% circulation feed-back system is formed such that total amount of gas flowed out of an exhaust port 22 of a gas flow passage 23 is flowed in again through a gas inlet 21.;COPYRIGHT: (C)2014,JPO&INPIT