JOINED STRUCTURE OF METALLIC MEMBER AND CERAMIC MEMBER AND METHOD OF JOINING METALLIC MEMBER AND CERAMIC MEMBER

摘要

PROBLEM TO BE SOLVED: To solve the problems with components of electronic parts and structural parts that the joining areas of metallic members and ceramic members using glass joining materials are made smaller from the downsizing and thickness reduction of these components, the joining strength of joint parts is made insufficient, cracking and peeling are brought about in manufactured steps by the thermal stress in the manufacturing stages and the externals tress during use and the breaking of the hermeticity in the joint parts is resulted. ;SOLUTION: The ceramic member 2 and the metallic member 3 are joined across a joining layer formed with a metallic layer 6 which consists essentially of a metallic component of ≤1,100°C in liquids line temperature and contains at least one kind among titanium, zirconium and hafnium as active metals, an oxidation layer 5 of an active metal and a glass layer 4, successively from the metallic member 3 side.;COPYRIGHT: (C)2003,JPO