MICROMINIATURE OPTOELECTRONIC MACHINE SYSTEM(MOEMS)

摘要

PROBLEM TO BE SOLVED: To provide a mechanism aligning chips and an optical fiber with a simple method by using a mirror without aligning them under the use of a microscope.;SOLUTION: When an MEMS-based adjustable mirror module is used, it is possible to make an optical fiber existing in a substrate to be in an alignment state more quickly, at a lower cost and more simply. Moreover, when the movable mirrors formed on the substrate are used, it is possible to prevent alignment failure by adjusting an optical path after the optical fiber is attached to the substrate and, thereafter, by fixing the mirrors at that positions.;COPYRIGHT: (C)2003,JPO