METHOD OF PRODUCING AMORPHOUS CARBON FILM AND AMORPHOUS CARBON-COATED SLIDING PARTS

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an amorphous carbon film which has excellent wear resistance, adhesion and seizure resistance, and has a reduced friction coefficient, and to provide amorphous carbon-coated sliding parts which have the same amorphous carbon film on the surface, have a sufficiently reduced friction resistance, and can improve a fuel consumption particularly in an internal combustion engine.;SOLUTION: Solid carbon targets 10a and 10b, and a metallic target 11 consisting of at least one kind of addition metal selected from the groups IVa, Va and VIa and Si are arranged at the inside of a vacuum tank 1. While these targets are sputtered, gaseous hydrocarbon and an inert gas are simultaneously introduced into the vacuum tank, so that the amorphous carbon film consisting of the addition metal, carbon and hydrogen is formed on a base material 9. Preferably, the content of hydrogen in the amorphous carbon film is 5 to 25 atomic %, and the ratio of the addition metal in the amorphous carbon film is 0.01 to 30 atomic %.;COPYRIGHT: (C)2003,JPO