PIEZOELECTRIC MICRO-ACTUATOR AND MICRO-MIRROR EQUIPPED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric micro-actuator and a micro-mirror equipped therewith capable of generating a large angle of rotation with low applied voltage and easily being realized by applying micromachining technology.;SOLUTION: In the device, a piezoelectric element film 201a which is positioned in one side face side of an intermediate electrode 204 and a piezoelectric element film 201b which is positioned in the other side face of the intermediate electrode 204 are arranged so that the polarization directions become opposite to each other. Positive electrodes and negative electrodes are alternately arranged on the outer surfaces of the piezoelectric element film 201a positioned in one side face side and the piezoelectric element film 201b positioned in the other side face, and the voltage is applied to the electrodes. As a result, the piezoelectric element films are alternately bent and deformed in the opposite directions at adjacent linear parts 102b.;COPYRIGHT: (C)2003,JPO