LAMINATED ELECTRODE, ELECTRONIC DEVICE, RESISTANCE CHANGE DETECTION ELEMENT, RESISTANCE CHANGE DETECTION METHOD AND APPARATUS, AND MAGNETRORESISTIVE EFFECT ELEMENTS AND THEIR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To achieve alignment accuracy with a minute size of approximately 0.005 to 0.01 μm even if a normal manufacturing apparatus is used, and to obtain a laminated electrode to be miniaturized of various kinds of an electronic device, and the electronic device and its manufacturing method.;SOLUTION: A resistance change detection element 100B in the second embodiment comprises a laminated electrode 200B provided on an upper surface and a lower-side electrode 120 provided on the upper surface while sandwiching a resistance thin film 110A. The laminated electrode 200B is composed of conductive films Cd of first, second, and third layers where a surface where one end section is inclined to a surface 111 of the resistance thin film 110A being a flat reference surface is formed, and the insulating film of the first layer that is held between the conductive films of the first and second layers and an insulating film In of the second layer that is held between the conductive films of the second and third layers. Width W of each end face in contact with the surface 111 is prescribed to specific one for laminating, incorporation into a microscopic magnetic head, a GMR head, and the like is made, and use as a height sensor is made.;COPYRIGHT: (C)2003,JPO