And method of manufacturing the exchange coupling film, method of manufacturing a magneto-resistance effect element using the exchange coupling film and method of manufacturing a thin film magnetic head using the magneto-resistance effect element,

摘要

An exchange coupling film includes a first antiferromagnetic layer formed on a pinned magnetic layer, and a second antiferromagnetic layer formed thereon. A composition ratio of an element X in the first antiferromagnetic layer is larger than that of the second antiferromagnetic layer. Preferably, a non-aligned state is created at an interface between the first antiferromagnetic layer and the pinned magnetic layer, whereby a large exchange coupling magnetic field is obtained upon heat-treatment.