METHOD OF MANUFACTURING FINE PARTICLES BY SPRAY THERMAL DECOMPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To manufacture fine particles of a nanometer-sized oxide, sulfide, silicate, metal, alloy or these complex having high crystallinity.;SOLUTION: The method of manufacturing the fine particles by the spray thermal decomposition of a raw material solution is composed of a process for dissolving an inorganic compound except the raw material components, which forms melted liquid drops in the thermal decomposition, into the raw material solution, a process for forming primary particles of an objective material collected inside medium particles composed of the inorganic compound and formed by solidifying and a process for recovering the fine particles by isolating the primary particles from the medium particles.;COPYRIGHT: (C)2003,JPO