ALIGNMENT MATCHING METHOD OF MICROSCOPE AND MICROSCOPE HAVING ALIGNMENT MATCHING DEVICE OF LIGHT BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method capable of easily regulating a beam path within an optical system.;SOLUTION: The light beam (1) of the microscope (15) is inputted and coupled to a regulating device (7) of the light beam (1) at a prescribed position and at this time the inputted and coupled light beam (9) is formed within the device (70). The inputted and coupled light beam (9) is deflected to at least two photodetectors (10 and 22). The photodetectors (10 and 22) respectively have the different distances from the prescribed positions and the deviation between the inputted and coupled light beam (9) and a target position (72) is detected from the electric signals of the photodetectors (10 and 20) and an optical component (76) is regulated to bring the inputted and coupled light beam (9) to the target position (72) across at least one regulating element (78).;COPYRIGHT: (C)2003,JPO