METHOD AND PROGRAM FOR DEFINING PROCESS CONTROL MODEL, AND PROCESS CONTROL METHOD AND ITS SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method for defining a process control model and its program, etc., capable of constructing a process control system consistent with the existing system at an early stage by defining the process control model by correlating it with the respective parameters of constitutional components of a manufacturing shop and a system of the existing data base or the like. SOLUTION: An equipment operation sequence and the process control model are defined in consideration of structure of the manufacturing shop and structure of a data base in a manufacturing system. The respective parameters of the process control model are correlated with the respective parameters of the data base or recipe and the manufacturing shop is evaluated in advance based on the process control model. Furthermore, the recipe is decided based on the process control model and the process control system consistent with the existing system is formed by operating the respective pieces of manufacturing equipment.