MICROSTRUCTURAL BODY ARRAY, METALLIC MOLD FOR MICROLENS ARRAY AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To realize a microstructural body array such as a metallic mold for microlens array with which a microlens array having a small radius of curvature can be manufactured by controlling the ratio of the interval between aperture parts to the size of the aperture part.;SOLUTION: In the method of manufacturing the microstructural body array, an insulating mask layer 24 is formed on the conductive part 23 of a substrate 22, and a plurality of aperture parts are formed on the layer 24. Then an electroplated or electrodeposited layer 25 is formed from the aperture parts. When the diameter or width of the aperture part is defined as ϕ, and the interval between the apertures is defined as L, they satisfy a relational expression 5≤L/ϕ.;COPYRIGHT: (C)2003,JPO