DIFFRACTION GRATING EXCHANGE TYPE ELECTROMAGNETIC WAVE GENERATOR, DIFFRACTION GRATING POSITION ADJUSTING METHOD AND APPARATUS THEREOF

摘要

PROBLEM TO BE SOLVED: To exchange the other diffraction grating without breaking a vacuum after an electromagnetic wave generating state is adjusted using a reference diffraction grating within a vacuum chamber.;SOLUTION: The diffraction grating exchange type electromagnetic wave generator, a diffraction grating position adjusting method and its apparatus are configured so that the other diffraction gratings (4, 4b and 4c) are exchanged without breaking a vacuum after a position is adjusted with the reference diffraction grating (4a) within the vacuum chamber (1), and the position is adjusted by detecting electromagnetic waves (11) from minute domains of both ends (P1, P2) of the reference diffraction grating (4a) using a pair of light receiving elements (21, 21a).;COPYRIGHT: (C)2003,JPO