ANGLE CALIBRATION APPARATUS USING X-RAY POLYHEDRAL MIRROR AND ANGLE CALIBRATION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an angle calibration apparatus using an X-ray polyhedral mirror, and an angle calibration method using the same. ;SOLUTION: When the center axis of an X-ray polygon crystal 7 is set to [0, 1, -1] of a silicon single crystal, a surface index enabling geometric reflection becomes xhh and a large number of reflecting surfaces are obtained according to an extinction rule of X-ray diffraction of a diamond structure. Since a 110 axis is twice symmetry, these reflecting surfaces appear on an opposite side and, in this case, 340 reflecting surfaces in total can be utilized. Two orthogonal reflecting surfaces in the X-ray polygon crystal 7 are set so as to be made parallel to two posture adjusting tilt stages 5 and the center is allowed to coincide with the center of a rotary table 8 by an XY stage 5 and the reflection of X-rays is utilized to adjust the center line of the X-ray polygon crystal 7 so as to make the same parallel to the axis of the rotary table 8 so that the center line is almost overlapped with the axis of the rotary table 8. When the X-ray polygon crystal 7 after adjustment is rotated, Bragg reflection is successively generated and the position of a Bragg angle can be determined by a reflection intensity curve caught by an X-ray detector 9.;COPYRIGHT: (C)2003,JPO