ALICYCLIC-HYDROCARBON-BACKBONE-CONTAINING COMPOUND, ALICYCLIC-HYDROCARBON-BACKBONE-CONTAINING POLYMER, AND RADIATION-SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a novel alicyclic-hydrocarbon-backbone-containing compound having a polymerization activity, an alicyclic-hydrocarbon-backbone- containing polymer, and a radiation-sensitive resin composition.;SOLUTION: This alicyclic-hydrocarbon-backbone-containing compound is represented by formula (1) (wherein R₁ is a group having an alicyclic hydrocarbon backbone and has 4-20 carbon atoms; and R₂ and R₃ are each H or a 1-3C alkyl). The alicyclic-hydrocarbon-backbone-containing resin has repeating units derived from the compound represented by formula (1), is hardly alkali-soluble, has acid-dissociable groups, and becomes alkali-soluble when the acid-dissociable groups are dissociated by the action of an acid. The radiation-sensitive resin composition contains the resin and a radiation-sensitive acid generator.;COPYRIGHT: (C)2003,JPO