CURRENT INTRODUCING TERMINAL AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a current introduction terminal which reduces the labor of an operation such as a mounting operation, a maintenance operation or the like and by which an electrical connection can be performed easily, and to provide a semiconductor manufacturing apparatus using the current introduction terminal. ;SOLUTION: The current introduction terminal 12 is provided with a conductive rod 40, a cylindrical body 42 which surrounds the conductive rod 40 and guides the conductive rod 40 so as to be slidable in the longitudinal direction of the conductive rod 40, and a coil spring 44 (an urging means) which is arranged inside the cylindrical body 42 and urges the conductive rod 40 in such a way that one end of the conductive rod 40 protrudes from the cylindrical body 42.;COPYRIGHT: (C)2003,JPO