DEVICE FOR ADJUSTING QUANTITY OF LIGHT AND ILLUMINANCE AND SAMPLE-INSPECTING APPARATUS WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To enable a quantity of light of an illumination light to be adjusted without using a special optical member and continuously without steps.;SOLUTION: A sample-inspecting apparatus inspects a defect or the like of a sample 11 by a lighting device (an integrating sphere 6 and a light trapping face 9) for illuminating the sample 11 with the illumination light having a predetermined illuminance, a pair of light guide means 3 and 4 for guiding the illumination light having the predetermined illuminance and emitted from an illumination light source 1 to the lighting device, and the illumination light having the predetermined illuminance and guided by the pair of guide means 3 and 4. The apparatus has means 14 and 15 set for adjusting an illumination quantity of light or an illumination illuminance to the sample 11 by adjusting a distance between an end face of the light guide means 3, 4 of the side of the light source 1 and an end face of the light guide means 3, 4 of the side of the sample 11 and by adjusting an incident amount of light from the light guide means 3, 4 of the side of the light source 1 to the light guide means 3, 4 of the side of the sample 11.;COPYRIGHT: (C)2003,JPO