MANUFACTURING METHOD OF ELECTRIC FIELD-EMISSION ELECTRON SOURCE, ELECTRIC FIELD-EMISSION ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electric field-emission electron source wherein enhancement of insulation voltage resistance, life-elongation and area enlargement area easy. ;SOLUTION: In an anodization process, a treatment tank 41 containing an electrolytic solution B is utilized. Temperature and concentration of the electrolytic solution B in the treatment tank 41 are managed by an electrolytic solution management device 46. The electrolytic solution management device 46 is provided with a control tank wherein the electrolytic solution B of the treatment tank 41 is introduced through an electrolytic solution discharge duct 44, adjusted so that the temperature and concentration of the electrolytic solution B is respectively retained at a prescribed value and the solution is delivered into the treatment tank 41 through an electrolytic solution delivery pipe 45. A rotating wing 42 driven by a driving device 43 is installed in the treatment tank 41, and the electrolytic solution B is stirred. A stirring device and the electrolytic solution management device 46 constituted of the rotating wing 42 and the driving device 43 are constituting a management means to manage the concentration of the electrolytic solution B in the treatment tank 41 so that realization of a high porosity progresses at the same rate in the inside of a face of a poly-crystal silicon layer as a semiconductor layer.;COPYRIGHT: (C)2003,JPO