ULTRAHIGH-PRESSURE MERCURY LAMP AND SEMICONDUCTOR ALIGNER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prolong the lighting life and prevent the occurrence of illumination nonuniformity. SOLUTION: This mercury lamp comprises a light emitting part satisfying the relationship 0L1 /L=0.30 when a longitudinal length of the light emitting part is L, and a length between the upper end of the light emitting part and the maximum diameter part is L1 in the light emitting part which is located in the center of an arc tube and has a vertically asymmetric egg-shape, a sealing tube part formed vertically extending from the light emitting part, a cathode arranged at the upper side in the light emitting part, an anode which is arranged so as to be opposed to the cathode and arranged so that the center between the anode and the cathode is set to be 9L/20 to 11L/20, inner lead bars which are embedded in the sealing tube part and separately connected to the anode and cathode, and metallic foils electrically connected to these inner lead bars separately.