ATMOSPHERIC PRESSURE PLASMA TREATMENT EQUIPMENT, ATMOSPHERE PRESSURE PLASMA TREATMENT METHOD, BASE MATERIAL, OPTICAL FILM AND IMAGE DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide atmospheric pressure plasma treatment equipment which forms films not giving rise to a change with lapse of time in a base material, dense films and films having powerful adhesive strength.;SOLUTION: This atmospheric pressure plasma treatment equipment places the base material between opposite electrodes under the atmosphere pressure or the pressure near the atmosphere pressure, allows gas containing reactive gas and inert gas to exist and impresses a high-frequency voltage thereto to generate a discharge plasma, thereby performing the surface treatment of the base material. The equipment described above has a gas introducing port for supplying the gas between the opposite electrodes and causes the content of the reactive gas in the gas supplied from the gas introducing port to fluctuate.;COPYRIGHT: (C)2003,JPO