REMOVING MEMBER FOR FOREIGN MATTER STUCK TO PROBE TIP, MANUFACTURING METHOD THEREFOR, METHOD FOR CLEANING FOREIGN MATTER STUCK TO PROBE TIP, PROBE AND PROBING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide the removing member of foreign matters stuck to a probe tip, which prevents the probe tip from being shaved and from becoming thin and whose life can be prolonged.;SOLUTION: The removing member of foreign matters stuck to the probe tip is provided with a base plate 3, a first elastic member 4a formed on the base plate 3, a second elastic member 4b formed on the first elastic member 4a and a polishing layer 5 formed on the second elastic member 4b and is constituted of hard grains 5a and a binder material 5b.;COPYRIGHT: (C)2003,JPO