Electro-optic modulator having high bandwidth and low drive voltage

摘要

A high-speed external optical modulator formed on a lithium niobate substrate has a diffused optical waveguide, a surface buffer layer, and electrodes for applying modulating RF energy. The electrodes are electroplated in at least two steps, resulting in a top co-planar waveguide structure lying on a second one. Low driving voltage is achieved through selection of the width, position, and dimension of the lower hot and ground electrodes. The upper ground electrodes and, preferably, also the upper hot electrode, are narrower in width than the corresponding lower electrodes, which helps to provide good velocity matching, good impedance values, and low electrical losses.