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Semiconductor auto leak rate tester

机译:半导体自动检漏率测试仪

摘要

A method for automatically conducting a leak test for a vacuum system includes receiving a process status input representing the completion of a manufacturing cycle. On determining that the process status is in a complete state, the vacuum system isolation valve is closed. In one embodiment, the first pressure input is measured at the beginning of the leak test and compared to a second pressure input measured at the expiration of timer. If the difference between the first and second pressure measurements are greater than the configurable threshold pressure, then the vacuum system is determined to be leaky. In another embodiment, the vacuum system is determined to be leaky if at least one of a series of pressure measurements exceeds the threshold pressure value. In response to the determination of the leak, an interlock signal to disable the operation of the vacuum system is activated.
机译:一种自动进行真空系统泄漏测试的方法,包括接收代表制造周期完成的过程状态输入。在确定过程状态为完成状态时,关闭真空系统隔离阀。在一个实施例中,在泄漏测试开始时测量第一压力输入,并将其与在计时器到期时测量的第二压力输入进行比较。如果第一和第二压力测量值之间的差大于可配置的阈值压力,则确定真空系统泄漏。在另一实施例中,如果一系列压力测量中的至少一个超过阈值压力值,则确定真空系统是泄漏的。响应于泄漏的确定,激活禁用真空系统操作的互锁信号。

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