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Correlation of end-of-line data mining with process tool data mining
Correlation of end-of-line data mining with process tool data mining
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机译:线下数据挖掘与过程工具数据挖掘的相关性
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摘要
One embodiment of the present invention is a process tool optimization system that includes: (a) a data mining engine that analyzes end-of-line yield data to identify one or more process tools associated with low yield; and (b) in response to output from the analysis, analyzes process tool data from the one or more process tools to identify one or more process tool parameters associated with the low yield.
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