首页> 外国专利> Juxtaposed island manufacturing method by means of self-organised deposition on a substrate and structure obtained using said method

Juxtaposed island manufacturing method by means of self-organised deposition on a substrate and structure obtained using said method

机译:通过自组织沉积在基板上的并列岛制造方法以及使用该方法获得的结构

摘要

The invention relates to a structure composed of a substrate wherein a surface supports juxtaposed islands, characterized in that the islands rest on a periodic network of terraces composed of the intersection of two step networks, each terrace having a first dimension corresponding to the step width of one of the step networks and a second dimension corresponding to the step width of the other step network, each terrace supporting at least two islands formed of a different superimposition of monolayers wherein the composition is chosen between at least one first composition and one second composition.
机译:本发明涉及一种由衬底构成的结构,其中表面支撑并列的岛,其特征在于,岛位于由两个阶梯网络的交点组成的阶的周期性网络上,每个阶具有与阶跃宽度相对应的第一尺寸。阶梯网络中的一个和与另一阶梯网络的阶梯宽度相对应的第二维度,每个平台支撑由不同的单层叠加形成的至少两个岛,其中所述组成在至少一个第一组成和一个第二组成之间选择。

著录项

  • 公开/公告号US2003064570A1

    专利类型

  • 公开/公告日2003-04-03

    原文格式PDF

  • 申请/专利权人 MARTROU DAVID;MAGNEA NOEL;

    申请/专利号US20020163035

  • 发明设计人 DAVID MARTROU;NOEL MAGNEA;

    申请日2002-06-04

  • 分类号H01L21/20;H01L21/36;

  • 国家 US

  • 入库时间 2022-08-22 00:09:01

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