Fuse and anti-fuse concept using a focused ion beam writing technique

摘要

A high-resolution focused ion beam programming technique wherein fuse-like and anti-fuse-like elements are provided for on-chip tight-area circuit programming applications. The focused ion beam programming can be used in a very high density circuit area and thus increase the design flexibility. Compared to laser programming techniques, the yield of focused ion beam programming can be much higher due to its high-resolution, localized heating and non-destructive nature.