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Semiconductor device image inspection utilizing rotation invariant scale invariant method

机译:利用旋转不变尺度不变方法的半导体器件图像检查

摘要

A method of inspecting semiconductor die and lead frame assemblies uses rotation invariant/scale invariant processing methods of machine vision data. A training image is acquired and processed to form a training model. A runtime image is acquired and processed using rotation invariant/scale invariant tools to find a runtime instance of the trained model and produce x, y, theta and scale information. The runtime instance is aligned to the train time model, or vice versa, and then compared to the train time model. The features and edges from the runtime image are compared to features and edges of the training model to identify discrepancies as possible defects. The possible defects are further processed with a morphological filter and/or a blob filter to further refine images of the defects. Alternative implementations of the invention measure adhesive wet-out around semiconductor dies and provide measurements of die rotation.
机译:一种检查半导体管芯和引线框架组件的方法,它使用机器视觉数据的旋转不变/比例不变处理方法。获取并处理训练图像以形成训练模型。使用旋转不变/比例不变工具获取并处理运行时图像,以找到训练模型的运行时实例,并生成x,y,θ和比例信息。将运行时实例与火车时间模型对齐,反之亦然,然后将其与火车时间模型进行比较。将运行时映像中的特征和边缘与训练模型的特征和边缘进行比较,以将差异识别为可能的缺陷。用形态学过滤器和/或斑点过滤器进一步处理可能的缺陷,以进一步细化缺陷的图像。本发明的替代实施方式测量半导体管芯周围的粘合剂润湿并提供管芯旋转的测量。

著录项

  • 公开/公告号US6563324B1

    专利类型

  • 公开/公告日2003-05-13

    原文格式PDF

  • 申请/专利权人 COGNEX TECHNOLOGY AND INVESTMENT CORPORATION;

    申请/专利号US20000727888

  • 发明设计人 SANJAY NICHANI;

    申请日2000-11-30

  • 分类号G01R310/20;

  • 国家 US

  • 入库时间 2022-08-22 00:07:34

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