首页>
外国专利>
Pressurized membrane platen design for improving performance in CMP applications
Pressurized membrane platen design for improving performance in CMP applications
展开▼
机译:加压膜压板设计可提高CMP应用的性能
展开▼
页面导航
摘要
著录项
相似文献
摘要
An invention is disclosed for improved performance in a CMP process using a pressurized membrane as a replacement for a platen air bearing. In one embodiment, a platen for improving performance in CMP applications is disclosed. The platen includes a membrane disposed above the platen, and a plurality of annular bladders disposed below the membrane, wherein the annular bladders are capable of exerting force on the membrane. In this manner, zonal control is provided during the CMP process.
展开▼